Essays Tagged: "Deep Reactive Ion Etching"

Microelectromechanical Systems (MEMS)

ve. A slightly more expensive type of bulk micromachining, which allows for greater flexibility, is Deep Reactive Ion Etching. Unlike the traditional bulk micromachining, this technique uses plasma et ... ung (Electroforming), Abformung (Molding), which essentially describes the process involved. First, deep x-ray lithography occurs which produces a high aspect ratio. The x-rays break down the chemical ...

(4 pages) 1 0 0.0 Jul/2014

Subjects: Science Essays > Engineering